Dipl.-Ing. Schabnam Naggary

  • Former Assistant - Chair Theoretische Elektrotechnik
Naggary, Schabnam

Address

Lehr­stuhl für Theo­re­ti­sche Elek­tro­tech­nik
Fa­kul­tät für Elek­tro­tech­nik und In­for­ma­ti­ons­tech­nik
Ruhr-Uni­ver­si­tät Bo­chum
Uni­ver­si­täts­stra­ße 150
44801 Bo­chum
Ger­ma­ny

Room
ID 1/134
Phone:
(+49)(0)234 / 32 - 29471
Fax:
(+49)(0)234 / 32 - 14479
Email:
naggary@tet.rub.de

Publications

2018
Analysis of the power dissipation in a lumped element model for capacitive discharges

Dennis Engel, Laura Kroll, Schabnam Naggary, Ralf Peter Brinkmann - 71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

An Effective RF Sheath Model that Includes Thermal and Non-harmonic Modulation Effects

Laura Kroll, Schabnam Naggary, Dennis Engel, Ralf Peter Brinkmann - 71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

2016
Obtaining the thickness from linear sheath model

Farina Voigt, Schabnam Naggary, Ralf Peter Brinkmann - WELT­PP-19, De­cem­ber 1-2, 2016 at Rol­duc, Kerk­ra­de, the Nether­lands

Investigation of plasma-sheath resonances in low pressure discharges

Schabnam Naggary, Efe Kemaneci, Ralf Peter Brinkmann, Mustafa Megahed - 69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016.

What is the size of a floating sheath? An answer

Farina Voigt, Schabnam Naggary, Ralf Peter Brinkmann - 69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 11, 2016.

2015
Modeling of dual frequency capacitive discharges with pulse-modulated power input

Schabnam Naggary, Efe Kemaneci, Mohammed Shihab, Ralf Peter Brinkmann, Zoltan Kovacs, Mustafa Megahed - 68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015

The characteristics of RF modulated plasma boundary sheaths: An analysis of the standard sheath model

Schabnam Naggary, Ralf Peter Brinkmann - 68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing, Honolulu, USA, October 12-15 2015

2014
Efficient Modelling of Pulsing CCP Reactors

Schabnam Naggary, Frank Atteln, Ralf Peter Brinkmann, Mustafa, Megahed - 67th Annual Gaseous Electronics Conference, Raleigh, USA, 03.-07.11.2014

A numerical study of the standard sheath model

Schabnam Naggary, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2014, Berlin, Ger­ma­ny, 17 - 21 March

2013
Characterization of capacitively coupled radio frequency discharges

Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann - WELT­PP-16, Kerk­ra­de, The Nether­lands, 21.-22. No­vem­ber 2013, Pos­ter

Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model

Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann, Mustafa Megahed - 66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Prin­ce­ton (New Jer­sey), USA, 30 Sep­tem­ber - 04 Oc­to­ber

Investigation of nonlinear dynamics in capacitively coupled radio frequency discharges

Schabnam Naggary, Abd Elfattah Elgendy, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 February - 01 March

2012
An improved global model of capacitively coupled plasma discharges by employing a more exact fluid sheath model

Schabnam Naggary, Abd Elfattah Elgendy, Ralf Peter Brinkmann - WELT­PP-15 , Kerk­ra­de, The Nether­lands, 22.-23. November 2012, Poster

2011
A spatially resolved model for the RF impedance and its corresponding admittance of the bulk of a low pressure plasma

Schabnam Naggary, Ralf Peter Brinkmann - WELT­PP-14, Kerk­ra­de, The Nether­lands, 01-02 De­cem­ber 2011

Ein räumlich aufgelöstes Modell der Resonanzeffekte in Niederdruck-CCPs

Schabnam Naggary, Dennis Ziegler, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, 28-31 March

2009
Spatially resolved modeling of the plasma series resonance excitation in capacitively coupled plasmas

Schabnam Naggary, Dennis Ziegler, Martin Lapke, Ralf Peter Brinkmann, Michael Klick - 62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October