Dr.-Ing. Martin Lapke

  • Former Assistant - Chair Theoretische Elektrotechnik
Lapke, Martin

Address

Ruhr-Uni­ver­si­tät Bo­chum
Lehr­stuhl für Theo­re­ti­sche Elek­tro­tech­nik
44780 Bo­chum
Ger­ma­ny

Email:
lapke@tet.rub.de

Publications

2021
On the Multipole Resonance Probe: Current Status of Research and Development

Jens Oberrath, Michael Friedrichs, Junbo Gong, Moritz Oberberg, Dennis Pohle, Christian Schulz, Chunjie Wang, Peter Awakowicz, Ralf Peter Brinkmann, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes - accepted in the IEEE Transactions on Plasma Science

2016
Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches

Ralf Peter Brinkmann, Harhausen, J, Benjamin Schröder, Martin Lapke, Robert Storch, Tim Styrnoll, Peter Awakowicz, Foest, R, Hannemann, M, Loffhagen, D, Ohl, A - PLASMA PHYSICS AND CONTROLLED FUSION Volume: 58 Issue: 1 Special Issue: SI Article Number: 014033 DOI: 10.1088/0741-3335/58/1/014033 Published: JAN 2016

2015
Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches

Ralf Peter Brinkmann, Jens Harhausen, Benjamin Schröder, Martin Lapke, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ruediger Foest, M Hannemann, D Loffhagen, Andreas Ohl - Plasma Physics and Controlled Fusion 58 014033 (2016)

Negative Power Absorption in Low-Pressure Inductive Discharges

Jan Trieschmann, Martin Lapke, Ralf Peter Brinkmann - 68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing, Honolulu, USA, October 12-15

2014
Study on electrostatic and electromagnetic probes operated in ceramic and metallic depositing plasmas

Tim Styrnoll, Stefan Bienholz, Martin Lapke, Peter Awakowicz - PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 23, Issue: 2, Article Number: 025013, DOI: 10.1088/0963-0252/23/2/025013, Published: APR 2014

2013
Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

Tim Styrnoll, J Harhausen, Martin Lapke, Robert Storch, Ralf Peter Brinkmann, R Foest, A Ohl, Peter Awakowicz - PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 22, Issue: 4, Article Number: 045008, DOI: 10.1088/0963-0252/22/4/045008, Published: AUG 2013

Active plasma resonance spectroscopy: a functional analytic description

Martin Lapke, Jens Oberrath, Ralf Peter Brinkmann - 2013 Plasma Sources Sci. Technol. 22 025005

2012
The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - 42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012

The Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics

Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Ilona Rolfes - 65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012

Characterization of Dielectric Deposition Processes Using Active Plasma Resonance Spectroscopy

Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - Kleinheubacher Tagung 2012, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 24-26, 2012

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012

Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde

Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - 16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz - PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde

Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Musch, Ilona Rolfes, Christian Zietz - DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16

2011
Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll - 64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011

A functional analytic description of active plasma resonance spectroscopy in terms of kinetic theory

Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann - Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland (2011)

Usage of electromagnetic modeling of the multipole resonance probe

Martin Lapke, Christian Schulz, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland, Aug 28 - Sep 2, 2011

Multipole Resonance Probe: From Simulation to Prototype

Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz - Proceedings of the 15th International Conference on Sensors and Measurement Technology. Nürnberg, 07.06.2011-09.06.2011

The Multipole Resonance Probe: Characterization of a Prototype

Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes, Christian Zietz - Plasma Sources Science and Technology, Vol. 20, No. 4, 042001, 2011

Dynamik einer planaren Mikroentladung- ein globales Modell

Markus Gebhardt, Alexander Wollny, Martin Lapke, Thomas Kuschel, Ilja Stefanovic, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2011,Kiel, Germany, 28-31 March

Funktionalanalytische Lösung des fluiddynamischen Modells der Multipolresonanzsonde

Jens Oberrath, Martin Lapke - DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, 28-31 March, oral contribution

Simultane Bestimmung von Elektronendichte und Temperatur mit der Multipolresonanzsonde in technischen Plasmen

Martin Lapke, Tim Styrnoll, Jens Oberrath, Christian Schulz, Robert Storch, Ralf Peter Brinkmann, Peter Awakowicz, Thomas Musch, Ilona Rolfes - DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, March 28-31, 2011

Bestimmung von Elektronendichte und Temperatur mit der Multipol-Resonaz-Sonde in Technologischen Plasmen

Tim Styrnoll, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

Funktionalanalytische Beschreibung der Multipol-Resonanz-Sonde

Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann, Christian Schulz, Ilona Rolfes, Thomas Musch, Tim Styrnoll, Peter Awakowicz - PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

2010
A functional analytic description of the multipole resonance probe

Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann - WELT­PP-13, Kerk­ra­de, The Nether­lands, 25-26 No­vem­ber, oral contribution

The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy

Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - 1st Middle East Conference on Antennas and Propagation (MECAP 2010), pp. 1-5, DOI: 10.1109/MECAP.2010.5724175, Cairo, Egypt, Oct 20-22, 2010

A functional analytic description of the multipole resonance probe

Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann - 63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

Electron density measurements in technological plasmas using the Multipole Resonance Probe

Tim Styrnoll, Martin Lapke, Christian Schulz, Robert Storch, Jens Oberrath, Thomas Musch, Ilona Rolfes, Peter Awakowicz, Ralf Peter Brinkmann - 63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, Oc­to­ber 4-8, 2010

Radio-Frequency Plasma Diagnostics with the Multipole Resonance Probe

Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes - Kleinheubacher Tagung 2010, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Oct 4-6, 2010

A general description of active resonance spectroscopic diagnostic tools for technical plasmas

Martin Lapke, Jens Oberrath, Ralf Peter Brinkmann - 37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24, oral contribution

Modelling of volume- and surface wave based plasma resonance spectroscopy

Martin Lapke, Ralf Peter Brinkmann - 37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24

Aktive Plasmaresonanzspektroskopie mit der Multipolresonanzsonde

Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Tim Niedzalkowski - DPG Frühjahrstagung, Hannover, Germany 08-12 März, oral contribution

Aktive Resonanzspektroskopie in Niederdruckplasmen: Analyse verschiedener Konzepte

Martin Lapke, Jens Oberrath, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung, Han­no­ver, Ger­ma­ny 08-12 März, oral cont­ri­bu­ti­on

Die Darwin-Approximation für technische Plasmen

Denis Eremin, Martin Lapke, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung, Han­no­ver, Ger­ma­ny 08-12 März

Prozesstaugliche Plasmadiagnostik mit der Multipolresonanzsonde

Ralf Peter Brinkmann, Peter Awakowicz, Martin Lapke, Thomas Musch, Jens Oberrath, Ilona Rolfes, Robert Storch, Tim Styrnoll, Thomas Zelder, Christian Zietz - Symposium Plasmatechnik für die Optikherstellung (SYPT), DPG Frühjahrstagung, oral contribution, Hannover, Germany, March 8-12, 2010

2009
Analytical modeling of the anomalous skin effect and negative power absortion in low pressure plasmas

Thomas Eisenbarth, Martin Lapke, Ralf Peter Brinkmann - 62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October

Electromagnetic treatment of the multipole resonance probe

Martin Lapke, Ralf Peter Brinkmann - 62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October

Spatially resolved modeling of the plasma series resonance excitation in capacitively coupled plasmas

Schabnam Naggary, Dennis Ziegler, Martin Lapke, Ralf Peter Brinkmann, Michael Klick - 62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October

Industriekompatible Diagnostik an technischen Plasmen

Martin Lapke, Ralf Peter Brinkmann - Kleinheuerbacher Tagung 2009, Miltenberg, Germany, 28-01 September, oral contribution

An electromagnetic model of the multipole resonanze probe

Martin Lapke, Ralf Peter Brinkmann - 8th Frontiers in Low Temperature Plasma Diagnostics, Blansko, Czech Republic, 19-23 April

Aktive Resonanzspektroskopie als robuste Plasmadiagnostik

Ralf Peter Brinkmann, Martin Lapke - DPG Früh­jahrs­ta­gung 2009, Greifs­wald, Ger­ma­ny, 30-02 March, oral cont­ri­bu­ti­on

Die Multipolresonanzsonde: Ein Beitrag zur Modellierung und Simulation elektromagnetischer Effekte

Martin Lapke, Ralf Peter Brinkmann - DPG Frühjahrstagung 2009, Greifswald, Germany, 30-02 March, oral contribution

Elektromagnetische Modellierung der Multipol-Resonanzsonde

Martin Lapke, Ralf Peter Brinkmann - PT 14, Wuppertal, Germany, 02-04 March, oral contribution

Practical implementation of a two-hemisphere plasma absorption probe

Martin Lapke, Ralf Peter Brinkmann, C. Scharwitz, M.Böke, M.Lapke - Appl. Phys. Lett. 94, 011502 (2009)

Active Plasma Resonance Spectroscopy: The concept and some examples

Ralf Peter Brinkmann, Martin Lapke, Tim Niedzialkowski, Jens Oberrath - 7. Technological Plasma Workshop 2009, Glasgow, United Kongdom

2008
The Multipole Resonance Probe: An effective lumped circuit approach

Martin Lapke, Ralf Peter Brinkmann - WeltPP-11, Kerkrade, The Netherlands, 13-14 November, oral contribution

Simultaneous determination of electron density and electron temperature in low-pressure plasmas using Multipol Resonance Probe

Martin Lapke, Ralf Peter Brinkmann - 61th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Dallas Texas, USA, 13-17 Oc­to­ber, oral contribution

A new diagnostic tool for low-temperature plasmas: the Multipole Resonance Probe

Martin Lapke, Ralf Peter Brinkmann - 35th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2008, Karlsruhe, Germany,15-19 June

Anregung von Harmonischen in kapazitiven Entladungen: Ein räumlich aufgelöstes nichtlineares Modell

Markus Gebhardt, Dennis Ziegler, Martin Lapke, Mustafa Bayrak, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2008, Darm­stadt, Ger­ma­ny, 10-14 March

Resonanzspektroskopische Diagnostikmethoden: Multipolresonanzsonde vs. Hairpin-Resonator

Martin Lapke, Kushova, Ralf Peter Brinkmann - DPG Frühjahrstagung 2008, Darmstadt, Germany, 10-14 March

2007
Electromagnetic Modeling of the Multipole Resonance Probe

Martin Lapke, Ralf Peter Brinkmann - WeltPP-10. Kerkrade, The Netherlands, 15-16 November

Harmonics excitation in capacitive rf discharges: A spatially resolved nonlinear model

Dennis Ziegler, Martin Lapke, Ralf Peter Brinkmann - 60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Arlington (Virginia), USA, 02-05 Oc­to­ber

Nonlinear electron resonance heating vs. the Herlofson paradox

Jens Oberrath, Martin Lapke, Dennis Ziegler, Ralf Peter Brinkmann - 60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber

The Multipole Resonance Probe: A new concept for electron densitiy determination

Martin Lapke, Ralf Peter Brinkmann - 28th Int. Conference on Phenomena in Ionized Gases ICPIG, Prague, Czech Republic, 15-20 Juli

Justification of simplifications in capacitive discharge modeling

Martin Lapke, Ralf Peter Brinkmann - Workshop on Radio-Frequency Discharges, Dublin, Ireland, 11-13 June

Active Plasma Resonance Spectroscopy: New Analysis and a New Concept

Martin Lapke, Ralf Peter Brinkmann - 7th Workshop on Frontiers in Low Temperature Plasma Diagnostics, Bishop Burton College, Beverley, UK, 01-05 April

Modeling and simulation of the plasma absorption probe

Martin Lapke, Ralf Peter Brinkmann, Chritsian Scharwitz, Mark Böke, Jörg Winter - Appl. Phys. Lett. 90, 121502 (2007);(3 pages)

Numerische Simulation der Absorptionssonde

Martin Lapke, Ralf Peter Brinkmann, Christian Scharwitz, Marc Böke, Jörg Winter - 13. Fachtagung Plasmatechnologie (PT 13), Bochum, Germany, 05-07 March

2006
Analyses and Simulation of the Plasma Absorption Probe

Martin Lapke - International Student Workshop on Plasma Science and Technology, Nagoya, Japan, 28 November, oral contribution

Nonlinear lumped circuit modeling of an atmospheric pressure rf discharge

Martin Lapke, Dennis Ziegler, Timo Gans, Volker Schultz-von der Gathen - 59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Columbus (Ohio), USA, 10-13 Oc­to­ber

Active Resonance Spectroscopy for Low Pressure Plasmas

Martin Lapke, Ralf Peter Brinkmann - 49th Workshop on Utilisation of Signal Control from Plasma Measurements to establish Process Control, Dublin, Ireland, 04-06 October

Aktive Resonanzspektroskopie für Niederdruckplasmen

Martin Lapke, Ralf Peter Brinkmann - DPG Frühjahrstagung, Augsburg, Germany, 27-30 march

2005
Investigations on resonnaces of bounded plasmas- An analycal approach

Martin Lapke, Ralf Peter Brinkmann - European Summer School Low Temperature Plasma Physics: Basics and Applications, Bad Honnef, Germany, 08-13 October

2004
Investigations on the Resonances of a Bounded Plasma

Martin Lapke, Ralf Peter Brinkmann - WeltPP-7, Kerkrade, The Netherlands, 26 November