B. Sc. Florian Krüger

  • Former Teaching Assistant - Chair Theoretische Elektrotechnik

Address

Ruhr-Uni­ver­si­tät Bo­chum
Lehr­stuhl für Theo­re­ti­sche Elek­tro­tech­nik
44780 Bo­chum
Ger­ma­ny

Room
ID 1/104
Phone:
(+49)(0)234 / 32 - 29472
Fax:
(+49)(0)234 / 32 - 14479
Email:
florian.krueger@rub.de

Publications

2019
A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

Florian Krüger, Sebastian Wilczek, Julian Schulze - 72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

Florian Krüger, Sebastian Wilczek, Julian Schulze - Plasma Sources Science and Technology, Volume 28, Number 7

2018
Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations

Florian Krüger, Tobias Gergs, Jan Trieschmann - 71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

Artificial Neural Networks as Plasma-Surface Interface for Sputtering and Gas-Phase Transport Simulations

Florian Krüger, Tobias Gergs, Jan Trieschmann - 16th International Conference on Plasma Surface Engineering September 17 - 21, 2018 Garmisch-Partenkirchen, Germany