Prof. Dr.-Ing. Dennis Ziegler

  • Former Assistant - Chair Theoretische Elektrotechnik

Address

Ruhr-Uni­ver­si­tät Bo­chum
Lehr­stuhl für Theo­re­ti­sche Elek­tro­tech­nik
44780 Bo­chum
Ger­ma­ny

Email:
ziegler@tet.rub.de

Publications

2012
Fast, kinetically self-consistent simulation of RF modulated plasma boundary sheaths

Mohammed Shihab, Dennis Ziegler, Ralf Peter Brinkmann - J. Phys. D: Appl. Phys 45, 185202 (2012)

2011
The asymmetric dynamics of the intermediate RF sheath

Mohammed Shihab, Dennis Ziegler, Tim Baloniak, Achim von Keudell, Ralf Peter Brinkmann - Pro­cee­dings of the 30th In­ter­na­tio­nal Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases (ICPIG), Belfast, Nort­hern Ire­land (2011)

Ein räumlich aufgelöstes Modell der Resonanzeffekte in Niederdruck-CCPs

Schabnam Naggary, Dennis Ziegler, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, 28-31 March

Numerische Simulationen zum Einfluss der Reaktorgeometrie auf Ionenenergie und Ionenbombardment in kapazitiv gekoppelten Plasmen

Jan Trieschmann, Dennis Ziegler, Ralf Peter Brinkmann, Dirk Hegemann - DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, 28-31 March

The dynamics of the RF sheath in capacitively coupled Plasmas

Mohammed Shihab, Dennis Ziegler, Ralf Peter Brinkmann - DPG Frühjahrstagung 2011,Kiel, Germany 28-31 March

Zeitliche Struktur der Elektronenheizung in kapazitiven Entladungen

Dennis Ziegler - DPG Früh­jahrs­ta­gung 2011,Kiel, Germany, 28-31 March, oral contribution

Self consistent model for capacitive coupled plasmas

Mohammed Shihab, Dennis Ziegler, Ralf Peter Brinkmann - PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

2010
A Global Model of a Micro Atmospheric Pressure Plasma Jet

Alexander Wollny, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann - 63rd Annual Gaseous Electronics Conference 2010, Paris, France, October 04-08

Kinetic approach to the nonlinearity of RF modulated sheath

Mohammed Shihab, Dennis Ziegler, Ralf Peter Brinkmann - 63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

Dennis Ziegler, Jan Trieschmann, Ralf Peter Brinkmann, Julian Schulze, Uwe Czarnetzki, Egmont Semmler, Peter Awakowicz, Deborah O'Connell, Timo Gans - Plasma Sources Sci. Technol. 19 (2010)

Numerical simulations of the electrode impedance e ect in capacitive radio frequency discharges

Max Engelhardt, Dennis Ziegler, Ralf Peter Brinkmann, Y.Yamazawa - 37th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2010, Nor­folk, Vir­gi­nia, USA, June 20-24

2009
A global model of a micro plasma jet at atmospheric pressure

Alexander Wollny, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann - WELTPP-12, Kerkrade, The Netherlands,26-27 November

Effect of the relative phase of the driving sources on heating in dual frequency capacitive discharges

Dennis Ziegler, Jan Trieschmann, Ralf Peter Brinkmann - 62th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Sa­ra­to­ga Springs (New York), USA, 20-23 Oc­to­ber

Experimental and theoretical studies of the electrode impedance effect in capacitive discharges

Dennis Ziegler, Ralf Peter Brinkmann, Yohei Yamazawa - 62th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Sa­ra­to­ga Springs (New York), USA, 20-23 Oc­to­ber, oral contribution

Spatially resolved modeling of the plasma series resonance excitation in capacitively coupled plasmas

Schabnam Naggary, Dennis Ziegler, Martin Lapke, Ralf Peter Brinkmann, Michael Klick - 62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October

Resonanzheizung von kapazitiv gekoppelten asymmetrischen Zweifrequenzentladungen

Dennis Ziegler, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2009, Greifs­wald, Ger­ma­ny, 30-02 March, oral cont­ri­bu­ti­on

Heating of asymmetric dual frequency capacitive discharges

Dennis Ziegler, Ralf Peter Brinkmann - GK1051 CCp-Workshop, Bochum, Germany, 25 März

Resonance heating in asymmetric multi-freuquency discharges

Dennis Ziegler, Ralf Peter Brinkmann - PT 14, Wup­per­tal, Ger­ma­ny, 02-04 March,

Temporal structure of electron heating in asymmetric single-frequency and dual-frequency discharges

Dennis Ziegler, Ralf Peter Brinkmann - AIP, Phys. Plasmas 16, 023503 (2009)

Influence of frequency and relative phase effects in dual frequency capacitive discharges on thin film deposition behavior

Egmont Semmler, Dennis Ziegler, D. O' Connel, Timo Gans, Peter Awakowicz, Achim von Keudell, Ralf Peter Brinkmann - 2nd Workshop on Radio-Frequency Discharges, La Badine - Presquile de Giens, France (2009)

2008
The nonlinear characteristics of the plasma boundary sheath: Results from a self-consistent model

Mustafa Bayrak, Dennis Ziegler, Ralf Peter Brinkmann - 60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber

Electron resonance heating in capacitive rf discharges

Dennis Ziegler - Dok­tor­an­den­kol­lo­qui­um 2008,GK 1051 , Kerk­ra­de, The Nether­lands, 18-19 June, oral contribution

Nonlinear resonance effects on electron heating in capacitive discharges

Dennis Ziegler, Markus Gebhardt, Ralf Peter Brinkmann, Michael A. Liebermann, Allan J. Lichtenberg, E. Kawamura - 35th IEEE International Conference on Plasma Science 2008, Karlsruhe, Germany, June 15-19

Nonlinear Dynamics in Dual Frequency Capacitive Discharges

Dennis Ziegler, Ralf Peter Brinkmann - 35th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2008, Karls­ru­he, Ger­ma­ny,June 15-19

Series resonance initiated heating of electrons in radio-frequency discharges

Dennis Ziegler, Ralf Peter Brinkmann - International Workshop on merging state-of-the-art plasma science into new technologies, Einhoven, The Netherlands, 14-16 May, oral contribution

Nonlinear electron resonance heating in dual frequency capacitive discharges

Dennis Ziegler - Nagoya University 2008, Japan, 08 May, oral contribution

Nonlinear electron resonance heating in dual frequency capacitive discharges

Dennis Ziegler - Yokohama University 2008, Japan, 07 May, oral contribution

Nonlinear electron resonance heating in dual frequency capacitive discharges

Dennis Ziegler - Osaka University 2008, Japan, 08 May, oral contribution

Skin effect in a small symmetrically driven capacitive discharge

Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Michael Klick - Plasma Sources Sci. Technol. 17, 025018 (2008)

Anregung von Harmonischen in kapazitiven Entladungen: Ein räumlich aufgelöstes nichtlineares Modell

Markus Gebhardt, Dennis Ziegler, Martin Lapke, Mustafa Bayrak, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung 2008, Darm­stadt, Ger­ma­ny, 10-14 March

Nichtlineare ohmsche und stochastische Heizung in kapazitiven Hochfrequenzentladungen

Dennis Ziegler, Ralf Peter Brinkmann, Michael A. Liebermann, Allan J. Lichtenberg - DPG Früh­jahrs­ta­gung, Darm­stadt, Ger­ma­ny, 10-14 March,

Nichtlineare Resonanzeffekte auf die Heizung von kapazitiv gekoppelten Zweifrequenzentladungen

Dennis Ziegler, Ralf Peter Brinkmann, Michael A. Liebermann, Allan J. Lichtenberg - DPG Früh­jahrs­ta­gung, Darm­stadt, Ger­ma­ny, 10-14 March, oral contribution

2007
Effects of matching networks on nonlinear plasma properties

A. Bossy, Dennis Ziegler, Mustafa Bayrak, Ralf Peter Brinkmann - Welt­PP-10. Kerk­ra­de, The Nether­lands, 15-16 No­vem­ber

Nonlinear Dynamics of Dual Frequency Capacitivel Discharge: A spatially resolved model

Dennis Ziegler, Ralf Peter Brinkmann - Welt­PP-10. Kerk­ra­de, The Nether­lands, 15-16 No­vem­ber

Nonlinear Dynamics of Dual Frequency Capacitivel Discharge

Dennis Ziegler, Ralf Peter Brinkmann - Ruhr-Uni­ver­si­ty Re­se­arch School- Sec­tion Days 2007, Bo­chum, Ger­ma­ny, 05-07 No­vem­ber

Harmonics excitation in capacitive rf discharges: A spatially resolved nonlinear model

Dennis Ziegler, Martin Lapke, Ralf Peter Brinkmann - 60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Arlington (Virginia), USA, 02-05 Oc­to­ber

Nonlinear electron resonance heating vs. the Herlofson paradox

Jens Oberrath, Martin Lapke, Dennis Ziegler, Ralf Peter Brinkmann - 60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber

Elektrische Charakterisierung von Zweifrequenzentladungen

Dennis Ziegler - Gra­du­ier­ten­kol­leg Dok­tor­an­den­kol­lo­qui­um, Bad Hon­nef, Ger­ma­ny, 30-31 July, oral cont­ri­bu­ti­on

High Frequency behaviour of dual frequency capacitively coupled plasmas

Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Ralf Peter Brinkmann - 28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

On the skin effect in symmetrically driven rf discharges

Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Michael Klick - 28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

High frequency behaviour of dual frequency capacitive discharges: A global model

Dennis Ziegler, Ralf Peter Brinkmann - Work­shop on Ra­dio-Fre­quen­cy Di­sch­ar­ges, Du­blin, Ire­land, 11-13 June

Nichtlineares Verhalten von kapazitiv gekoppelten Zweifrequenzentladungen

Dennis Ziegler, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung, Düsseldorf, Ger­ma­ny, 19-23 March

Modellbasiertes Regelungskonzept für kapazitiv gekoppelte Zweifrequenzentladungen

Dennis Ziegler, Ralf Peter Brinkmann - 13. Fach­ta­gung Plas­ma­tech­no­lo­gie (PT 13), Bo­chum, Ger­ma­ny, 05-07 March

Response to "Comment on 'A nonlinear global model of a dual frequency capacitive discharge

Dennis Ziegler, Ralf Peter Brinkmann - Phys. Plasmas 14, 014702 (2007)

2006
Nonlinear electron resonance heating in dual frequency capacitive discharges

Dennis Ziegler, Ralf Peter Brinkmann - 59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Co­lum­bus (Ohio), USA, 10-13 Oc­to­ber, oral contribution

Nonlinear lumped circuit modeling of an atmospheric pressure rf discharge

Martin Lapke, Dennis Ziegler, Timo Gans, Volker Schultz-von der Gathen - 59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Columbus (Ohio), USA, 10-13 Oc­to­ber

Plasma Series Resonance based Control Concept for Capacitive Discharges

Dennis Ziegler, Ralf Peter Brinkmann - 49th Work­shop on Uti­li­sa­ti­on of Si­gnal Con­trol from Plas­ma Me­a­su­re­ments to es­ta­blish Pro­cess Con­trol, Du­blin, Ire­land, 04-06 Oc­to­ber

A nonlinear global model of a dual frequency capacitive discharge

Dennis Ziegler, Ralf Peter Brinkmann - © 2006 American Institute of Physics Phys. Plasmas 13, 083501 (2006)

Ein nichtlineares globales Modell einer Kapazitiv gekoppelten Zweifrequenzentladungen

Dennis Ziegler - SFB und Gra­du­ier­ten­kol­leg Dok­tor­an­den­kol­lo­qui­um, Bad Hon­nef, Ger­ma­ny, 03-04 Au­gust, oral contribution

A nonlinear global model of an atmospheric pressure rf micro discharge

Dennis Ziegler, Timo Gans, Volker Schultz-von der Gathen - 18th Eu­ropean Con­fe­rence on the Ato­mic and Mole­cu­lar Phy­sics of Io­ni­zed Gases (ES­CAM­PIG XVIII), Leece, Italy, 12-18 July

Modelling of the sheath in micro RF discharges

Dennis Ziegler, Ralf Peter Brinkmann - 18th European Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XVIII), Leece, Italy, 12-18 July

Modellbsierte Regelung einer kapazitiv gekoppelten HF-Entladung

Egmont Semmler, Dennis Ziegler, Peter Awakowicz, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung, Augs­burg, Ger­ma­ny, 27-30 March

Self-Excited Electron resonance Spectroskopy in Dual Frequency Capacitively Coupled Plasmas

Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Ralf Peter Brinkmann - DPG Früh­jahrs­ta­gung, Augs­burg, Ger­ma­ny, 27-30 march

2005
Model-based Control Concept for Capacitive Discharges

Dennis Ziegler, Jan Falkenhain, Ralf Peter Brinkmann - Eu­ropean Sum­mer School Low Tem­pe­ra­tu­re Plas­ma Phy­sics: Ba­sics and Ap­p­li­ca­ti­ons, Bad Hon­nef, Ger­ma­ny, 08-13 Oc­to­ber

A closed-loop Control Scheme for Capacitively Coupled Plasmas

Dennis Ziegler, Ralf Peter Brinkmann - 27th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Eindhoven, The Netherlands, 17-22 Juli

SEERS-based Control of Capacitive Discharges

Dennis Ziegler, Ralf Peter Brinkmann - 6th European Advanced Equipment Control / Advanced Process Control Conference, Dublin, Ireland, 06-08 April

2004
Eigenmodes of a Plasma reactor for Inhomogeneous Density Profiles

Dennis Ziegler, Thomas Senega, Ralf Peter Brinkmann - Welt­PP-7, Kerk­ra­de, The Nether­lands, 25-26 No­vem­ber

The eigenmodes of a plasma eractor for inhomogeneous electron density profiles

Dennis Ziegler, Thomas Senega, Frank Hamme, Ralf Peter Brinkmann - Welt­PP-7, Kerk­ra­de, The Nether­lands, 25-26 No­vem­ber