M. Sc. Birk Berger

  • Former PhD - Chair Theoretische Elektrotechnik


Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze - https://doi.org/10.1088/1361-6595/ab9374

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann - 73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Theoretical investigation of the magnetic asymmetry effect by using a lumped element model

Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann - 2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko, Julian Schulze - Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas

Daksha, Manaswi, Birk Berger, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Donkó, Zoltán, Sebastian Wilczek - 69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.